NOTE: In courses which include a laboratory, satisfactory completion of the laboratory work is required in order to pass the course.
NE Electives:
Courses from any science or engineering department which are of relevant level to the area concentration. If not in the area concentration, courses should be 300 level or above. It is recommended that students take a sequence of classes from the area concentration. This will fulfill engineering science elective in their engineering curriculum.
NanoEngineering - Course Descriptions
NE 180 Engineering at the Nanoscale 2R-0L-2C S
Graduate Studies Eligible: No
Prerequisites: There are no prerequisites for this course.
Corequisites: There are no corequisites for this course.
Introduction to nanoscience and engineering: properties and behavior of materials, devices, and systems (natural and artificial) at nanoscale, applications of nanoscience. Characterization techniques: Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM), and thin film measurements. Basic cleanroom safety and experience, microfabrication processing techniques: photolithography, thin film deposition. Intro to design and data analysis software.
Graduate Studies Eligible: No
Prerequisites: There are no prerequisites for this course.
Corequisites: There are no corequisites for this course.
Introduction to nanoscience and engineering: properties and behavior of materials, devices, and systems (natural and artificial) at nanoscale, applications of nanoscience. Characterization techniques: Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM), and thin film measurements. Basic cleanroom safety and experience, microfabrication processing techniques: photolithography, thin film deposition. Intro to design and data analysis software.
NE 199 Professional Experience 1R-0L-1C
Graduate Studies Eligible: No
Prerequisites: There are no prerequisites for this course.
Corequisites: There are no corequisites for this course.
The professional experiences course captures the practical work experiences related to the student’s academic discipline. Students are required to submit a formal document of their reflections, which communicates how their employment opportunity reinforced and enhanced their academic studies. The course will be graded as “S” satisfactory, or “U” unsatisfactory based on the written report of the professional experience.
Graduate Studies Eligible: No
Prerequisites: There are no prerequisites for this course.
Corequisites: There are no corequisites for this course.
The professional experiences course captures the practical work experiences related to the student’s academic discipline. Students are required to submit a formal document of their reflections, which communicates how their employment opportunity reinforced and enhanced their academic studies. The course will be graded as “S” satisfactory, or “U” unsatisfactory based on the written report of the professional experience.
NE 280 Introduction to Nanoengineering 3.5R-1.5L-4C W
Graduate Studies Eligible: No
Prerequisites: There are no prerequisites for this course.
Corequisites: PH 113
Scaling laws in small systems; electronics and photonics devices and systems, basics of quantum and statistical mechanics, nanomaterials and fabrication: examples of zero, one, two, and three dimensional nanostructures, carbon nanotubes, Nanoelectronics: basics of solid state physics; electron energy band, semiconductors, tunneling and quantum structures, molecular electronics, Nanophotonics in metals and semiconductors, surface plasmon resonance and applications, photonic bandgap crystals.
Graduate Studies Eligible: No
Prerequisites: There are no prerequisites for this course.
Corequisites: PH 113
Scaling laws in small systems; electronics and photonics devices and systems, basics of quantum and statistical mechanics, nanomaterials and fabrication: examples of zero, one, two, and three dimensional nanostructures, carbon nanotubes, Nanoelectronics: basics of solid state physics; electron energy band, semiconductors, tunneling and quantum structures, molecular electronics, Nanophotonics in metals and semiconductors, surface plasmon resonance and applications, photonic bandgap crystals.
NE 290 Directed Study 1-4C
Graduate Studies Eligible: No
Prerequisites: Consent of instructor
Corequisites: There are no corequisites for this course.
Research for freshmen and sophomore students under the direction of a physics or optical engineering faculty member. May earn up to a maximum of 2 credits for meeting the graduation requirements. The student must make arrangements with a faculty member for the research project prior to registering for this course.
Graduate Studies Eligible: No
Prerequisites: Consent of instructor
Corequisites: There are no corequisites for this course.
Research for freshmen and sophomore students under the direction of a physics or optical engineering faculty member. May earn up to a maximum of 2 credits for meeting the graduation requirements. The student must make arrangements with a faculty member for the research project prior to registering for this course.
NE 320 Fundamentals of Thin Films: Fabrication and Applications 3R-3L-4C F (every other year)
Graduate Studies Eligible: No
Prerequisites: NE 280
Corequisites: There are no corequisites for this course.
Two- and three-dimensional nanostructures, including thin film materials, single and multi-layer nano-films, electronic energy band structures, thin-film and high-k electronics, multiple quantum well devices, and optical bandgap engineering. Thin film characterization, thermal properties of thin films, growth kinetics, coating and thin film fabrication techniques: sputtering, thermal evaporation, PECVD, and atomic layer deposition.
Graduate Studies Eligible: No
Prerequisites: NE 280
Corequisites: There are no corequisites for this course.
Two- and three-dimensional nanostructures, including thin film materials, single and multi-layer nano-films, electronic energy band structures, thin-film and high-k electronics, multiple quantum well devices, and optical bandgap engineering. Thin film characterization, thermal properties of thin films, growth kinetics, coating and thin film fabrication techniques: sputtering, thermal evaporation, PECVD, and atomic layer deposition.
NE 330 Material Failure 3R-3L-4C W
Graduate Studies Eligible: No
Prerequisites: PH 112
Corequisites: There are no corequisites for this course.
Principles of material failure; appearance, physical cause and mathematical description with emphasis on the materials used for micro-scale devices and assemblies. Failure types considered include Rupture, Fatigue, Creep, Corrosion, Electromigration, Electrical Overstress, Electrical Discharge and Thermal. Experiments illustrate the failure type and the machines used to study them. These include Electron, Optical and X-ray microscopes, Spectroscopy and Tension machines. A brief description of the working of each machine will be given.
Graduate Studies Eligible: No
Prerequisites: PH 112
Corequisites: There are no corequisites for this course.
Principles of material failure; appearance, physical cause and mathematical description with emphasis on the materials used for micro-scale devices and assemblies. Failure types considered include Rupture, Fatigue, Creep, Corrosion, Electromigration, Electrical Overstress, Electrical Discharge and Thermal. Experiments illustrate the failure type and the machines used to study them. These include Electron, Optical and X-ray microscopes, Spectroscopy and Tension machines. A brief description of the working of each machine will be given.
NE 380 Nanotechnology, Entrepreneurship & Ethics 3.5R-1.5L-4C S
Graduate Studies Eligible: No
Prerequisites: NE 280
Corequisites: There are no corequisites for this course.
Scaling laws in small systems; mechanical, biological, fluidics, and thermal systems. Nanomaterials and nanofabrication. Nanomechanics: cantilever oscillation, atomic-force microscopy (AFM) and its applications, nano-biotechnology, machinery of cell, and molecular motors. Nanoscale optics, Nanoscale heat: conduction, convection, and blackbody radiation. Basics of fluidics, nanoscale fluidics and applications, entrepreneurship and ethics, concepts and tools in innovation and social impacts of nanotechnology.
Graduate Studies Eligible: No
Prerequisites: NE 280
Corequisites: There are no corequisites for this course.
Scaling laws in small systems; mechanical, biological, fluidics, and thermal systems. Nanomaterials and nanofabrication. Nanomechanics: cantilever oscillation, atomic-force microscopy (AFM) and its applications, nano-biotechnology, machinery of cell, and molecular motors. Nanoscale optics, Nanoscale heat: conduction, convection, and blackbody radiation. Basics of fluidics, nanoscale fluidics and applications, entrepreneurship and ethics, concepts and tools in innovation and social impacts of nanotechnology.
NE 395 Nanoscale Fabrication & Characterization Techniques 3R-3L-4C F (every other year)
Graduate Studies Eligible: No
Prerequisites: NE 280
Corequisites: There are no corequisites for this course.
Fabrication and characterization techniques for zero- and one-dimensional nanoscale materials and devices. Process design and development. Bottom-up and top-down synthesis techniques. Assembly and self-assembly of nanomaterials into macro-articles. Synthesis techniques including liquid phase growth, chemical vapor deposition, and plasma synthesis. Characterization techniques such as microscopies, various spectroscopies, thermogravimetric analysis, and differential scanning calorimetry. Laboratory is a team project in which students will design, fabricate, and characterize nanomaterials.
Graduate Studies Eligible: No
Prerequisites: NE 280
Corequisites: There are no corequisites for this course.
Fabrication and characterization techniques for zero- and one-dimensional nanoscale materials and devices. Process design and development. Bottom-up and top-down synthesis techniques. Assembly and self-assembly of nanomaterials into macro-articles. Synthesis techniques including liquid phase growth, chemical vapor deposition, and plasma synthesis. Characterization techniques such as microscopies, various spectroscopies, thermogravimetric analysis, and differential scanning calorimetry. Laboratory is a team project in which students will design, fabricate, and characterize nanomaterials.
NE 406 Semiconductor Devices & Fabrication 3R-3L-4C W
Graduate Studies Eligible: No
Prerequisites: PH 405 or PH 505
Corequisites: There are no corequisites for this course.
Physical properties and applications of semiconductor devices including bipolar junction transistors (BJT), metal-semiconductor contacts (Schottky and ohmic), junction field effect transistors (JFET and MESFET), metal-oxide semiconductor (MOS) interfaces and field effect transistors (MOSFET and CMOS), photoconductors, photodetectors (PIN and APD), solar cells, light emitting diodes (LED), and laser diodes. Laboratory experiments will cover the following topics: characterization of semiconductor devices, op-amps, CMOS, NAND and other logic and analog components. Cross-listed with NE 506.
Graduate Studies Eligible: No
Prerequisites: PH 405 or PH 505
Corequisites: There are no corequisites for this course.
Physical properties and applications of semiconductor devices including bipolar junction transistors (BJT), metal-semiconductor contacts (Schottky and ohmic), junction field effect transistors (JFET and MESFET), metal-oxide semiconductor (MOS) interfaces and field effect transistors (MOSFET and CMOS), photoconductors, photodetectors (PIN and APD), solar cells, light emitting diodes (LED), and laser diodes. Laboratory experiments will cover the following topics: characterization of semiconductor devices, op-amps, CMOS, NAND and other logic and analog components. Cross-listed with NE 506.
NE 407 Nanoelectronic and Semiconductor Devices 2R-6L-4C F
Graduate Studies Eligible: No
Prerequisites: NE 406 or NE 506
Corequisites: There are no corequisites for this course.
Fabrication and characterization of micro/nanoelectronic devices; Process integration of various technologies, including CMOS, 2D materials, and nanowires; Surface processing for improved performance, including passivation, anti-reflection structures, and protective coatings. Process and device simulators illustrate concepts introduced in class. Laboratory is an integral component of this class in which students will fabricate a multi-junction semiconductor device. In-process measurement results are compared with final electrical test results and simulated designs.
Graduate Studies Eligible: No
Prerequisites: NE 406 or NE 506
Corequisites: There are no corequisites for this course.
Fabrication and characterization of micro/nanoelectronic devices; Process integration of various technologies, including CMOS, 2D materials, and nanowires; Surface processing for improved performance, including passivation, anti-reflection structures, and protective coatings. Process and device simulators illustrate concepts introduced in class. Laboratory is an integral component of this class in which students will fabricate a multi-junction semiconductor device. In-process measurement results are compared with final electrical test results and simulated designs.
NE 408 Microsensors and Actuators 3R-3L-4C S
Graduate Studies Eligible: No
Prerequisites: NE 410 or Junior or Senior standing, and consent of instructor
Corequisites: There are no corequisites for this course.
Microelectromechanical (MEMS) systems composed of microsensors, microactuators, and electronics integrated onto a common substrate. Design, fabrication, and operation principles. Examples of microsensors covered in the course include: thermal, radiation, mechanical, chemical, and biological. Laboratory is a team design project in which the students fabricate sensing devices such as pressure or thermal sensors and then characterize their behavior. Cross-listed with NE 508.
Graduate Studies Eligible: No
Prerequisites: NE 410 or Junior or Senior standing, and consent of instructor
Corequisites: There are no corequisites for this course.
Microelectromechanical (MEMS) systems composed of microsensors, microactuators, and electronics integrated onto a common substrate. Design, fabrication, and operation principles. Examples of microsensors covered in the course include: thermal, radiation, mechanical, chemical, and biological. Laboratory is a team design project in which the students fabricate sensing devices such as pressure or thermal sensors and then characterize their behavior. Cross-listed with NE 508.
NE 410 Introduction to MEMS: Fabrication & Applications 3R-3L-4C S
Graduate Studies Eligible: No
Prerequisites: Junior or Senior class standing
Corequisites: There are no corequisites for this course.
Properties of silicon wafers, wafer-level processes, vacuum systems, thin-film deposition via PVD, dry and wet etching, photolithography, surface and bulk micromachining, process integration, MEMS applications: heat actuators, capacitive accelerometer, DLP, bio-sensor, and pressure sensor. Cross-listed with ME 416, ECE 416, and CHE405.
Graduate Studies Eligible: No
Prerequisites: Junior or Senior class standing
Corequisites: There are no corequisites for this course.
Properties of silicon wafers, wafer-level processes, vacuum systems, thin-film deposition via PVD, dry and wet etching, photolithography, surface and bulk micromachining, process integration, MEMS applications: heat actuators, capacitive accelerometer, DLP, bio-sensor, and pressure sensor. Cross-listed with ME 416, ECE 416, and CHE405.
NE 411 Advanced topics in MEMS 3R-3L-4C F
Graduate Studies Eligible: No
Prerequisites: NE 410 or equivalent course
Corequisites: There are no corequisites for this course.
Topics such as: Microlithography, design process, modeling; analytical and numerical. Use of software for layout design and device simulation. Characterization and reliability of MEMS devices. MEMS and microelectronic packaging. Introduction to microfluidic systems. Applications in engineering, biomedicine, and chemistry. Cross-listed with ECE 419, and CHE 419.
Graduate Studies Eligible: No
Prerequisites: NE 410 or equivalent course
Corequisites: There are no corequisites for this course.
Topics such as: Microlithography, design process, modeling; analytical and numerical. Use of software for layout design and device simulation. Characterization and reliability of MEMS devices. MEMS and microelectronic packaging. Introduction to microfluidic systems. Applications in engineering, biomedicine, and chemistry. Cross-listed with ECE 419, and CHE 419.
NE 415 Engineering Physics Design I 2R-6L-4C S
Graduate Studies Eligible: No
Prerequisites: NE 380 or and Junior or Senior standing
Corequisites: ENGL H290
Principles of design. Codes of ethics appropriate to engineers. Case studies related to optical engineering and nanoengineering professional practice, teamwork, contemporary issues, patents and intellectual property. Team-oriented design project work on selected topics in optical engineering and nanoengineering. Introduction to product development practices, product research, planning and project management. Preliminary design of a product and product specifications. Deliver a design document specific to customer needs and constraints. Cross-listed with OE 415.
Graduate Studies Eligible: No
Prerequisites: NE 380 or and Junior or Senior standing
Corequisites: ENGL H290
Principles of design. Codes of ethics appropriate to engineers. Case studies related to optical engineering and nanoengineering professional practice, teamwork, contemporary issues, patents and intellectual property. Team-oriented design project work on selected topics in optical engineering and nanoengineering. Introduction to product development practices, product research, planning and project management. Preliminary design of a product and product specifications. Deliver a design document specific to customer needs and constraints. Cross-listed with OE 415.
NE 416 Engineering Physics Design II 2R-6L-4C F
Graduate Studies Eligible: No
Prerequisites: NE 415
Corequisites: There are no corequisites for this course.
Team-based capstone design project following structured design processes and utilizing knowledge gained from prior coursework. Project planning and budgeting, development of product/process specifications, application of engineering standards, system design and prototyping subject to multiple realistic constraints (cost, schedule, and performance). Formal midterm design review. Deliver initial statement of work and interim technical report. Laboratory activities supporting the formal design process. Cross-listed with OE 416.
Graduate Studies Eligible: No
Prerequisites: NE 415
Corequisites: There are no corequisites for this course.
Team-based capstone design project following structured design processes and utilizing knowledge gained from prior coursework. Project planning and budgeting, development of product/process specifications, application of engineering standards, system design and prototyping subject to multiple realistic constraints (cost, schedule, and performance). Formal midterm design review. Deliver initial statement of work and interim technical report. Laboratory activities supporting the formal design process. Cross-listed with OE 416.
NE 417 Engineering Physics Design III 2R-6L-4C W
Graduate Studies Eligible: No
Prerequisites: NE 416
Corequisites: There are no corequisites for this course.
Continuation of NE 416. System design and prototyping, performance testing, and data analysis. Formal midterm design review. Demonstration of a functional prototype. Deliver oral presentation and final technical report. Cross-listed with OE 417.
Graduate Studies Eligible: No
Prerequisites: NE 416
Corequisites: There are no corequisites for this course.
Continuation of NE 416. System design and prototyping, performance testing, and data analysis. Formal midterm design review. Demonstration of a functional prototype. Deliver oral presentation and final technical report. Cross-listed with OE 417.
NE 450 Nanomedicine 4R-0L-4C
Graduate Studies Eligible: No
Prerequisites: PH 113 or Junior or Senior standing and consent of instructor
Corequisites: There are no corequisites for this course.
Material presented includes the functions and properties of medical nanodevices, the design and fabrication of nanorobots and nanoparticles, the current and potential applications of nanomedicine. Introduction to cancer cell biology and techniques for selective targeting of cancer cells, simulations of the optical and thermal properties of normal and cancerous cell organelles. Nanoplasmonics: Lorentz-Mie simulations of optical properties of nanoparticles, the use of plasmonic nanoparticles in diagnosis and therapy. Introduction to the nanophotodynamic therapies and the new dynamic modes in selective nanophotothermolysis of cancer, the design and methods of activation of nanodrugs. Time and space evolutions of thermal fields in and around the nano- bio-particles and nanoclusters. Ablation of the soft and hard biological tissues by activated nanoparticles.
Graduate Studies Eligible: No
Prerequisites: PH 113 or Junior or Senior standing and consent of instructor
Corequisites: There are no corequisites for this course.
Material presented includes the functions and properties of medical nanodevices, the design and fabrication of nanorobots and nanoparticles, the current and potential applications of nanomedicine. Introduction to cancer cell biology and techniques for selective targeting of cancer cells, simulations of the optical and thermal properties of normal and cancerous cell organelles. Nanoplasmonics: Lorentz-Mie simulations of optical properties of nanoparticles, the use of plasmonic nanoparticles in diagnosis and therapy. Introduction to the nanophotodynamic therapies and the new dynamic modes in selective nanophotothermolysis of cancer, the design and methods of activation of nanodrugs. Time and space evolutions of thermal fields in and around the nano- bio-particles and nanoclusters. Ablation of the soft and hard biological tissues by activated nanoparticles.
NE 470 Special Topics in NanoEngineering 2-4C
Graduate Studies Eligible: No
Prerequisites: Consent of instructor
Corequisites: There are no corequisites for this course.
Lectures on special topics in nanoengineering.
Graduate Studies Eligible: No
Prerequisites: Consent of instructor
Corequisites: There are no corequisites for this course.
Lectures on special topics in nanoengineering.
NE 490 Directed Study 1-4C
Graduate Studies Eligible: No
Prerequisites: Consent of instructor
Corequisites: There are no corequisites for this course.
Research for junior and senior students under the direction of a physics and optical engineering faculty member. May earn up to a maximum of 2 credits for meeting the graduation requirements. The student must make arrangements with a faculty member for the research project prior to registering for this course.
Graduate Studies Eligible: No
Prerequisites: Consent of instructor
Corequisites: There are no corequisites for this course.
Research for junior and senior students under the direction of a physics and optical engineering faculty member. May earn up to a maximum of 2 credits for meeting the graduation requirements. The student must make arrangements with a faculty member for the research project prior to registering for this course.
NE 506 Semiconductor Devices & Fabrication 3R-3L-4C W
Graduate Studies Eligible: No
Prerequisites: PH 405 or PH 505
Corequisites: There are no corequisites for this course.
Physical properties and applications of semiconductor devices including bipolar junction transistors (BJT), metal-semiconductor contacts (Schottky and ohmic), junction field effect transistors (JFET and MESFET), metal-oxide semiconductor (MOS) interfaces and field effect transistors (MOSFET and CMOS), photoconductors, photodetectors (PIN and APD), solar cells, light emitting diodes (LED), and laser diodes. Laboratory experiments will cover the following topics: characterization of semiconductor devices, op-amps, CMOS, NAND and other logic and analog components. Graduate credit requires a more advanced project. Cross-listed with NE 406.
Graduate Studies Eligible: No
Prerequisites: PH 405 or PH 505
Corequisites: There are no corequisites for this course.
Physical properties and applications of semiconductor devices including bipolar junction transistors (BJT), metal-semiconductor contacts (Schottky and ohmic), junction field effect transistors (JFET and MESFET), metal-oxide semiconductor (MOS) interfaces and field effect transistors (MOSFET and CMOS), photoconductors, photodetectors (PIN and APD), solar cells, light emitting diodes (LED), and laser diodes. Laboratory experiments will cover the following topics: characterization of semiconductor devices, op-amps, CMOS, NAND and other logic and analog components. Graduate credit requires a more advanced project. Cross-listed with NE 406.
NE 507 Nanoelectronic and Semiconductor Devices 2R-6L-4C F
Graduate Studies Eligible: Yes
Prerequisites: NE 406 or NE 506 or consent of instructor
Corequisites: There are no corequisites for this course.
Fabrication and characterization of micro/nanoelectronic devices; Process integration of various technologies, including CMOS, 2D materials, and nanowires; Surface processing for improved performance, including passivation, anti-reflection structures, and protective coatings. Process and device simulators illustrate concepts introduced in class. Laboratory is an integral component of this class in which students will fabricate a multi-junction semiconductor device. In-process measurement results are compared with final electrical test results and simulated designs. Students must do additional project work on a topic selected by the instructor. Students may not receive credit for both NE 407 and NE 507.
Graduate Studies Eligible: Yes
Prerequisites: NE 406 or NE 506 or consent of instructor
Corequisites: There are no corequisites for this course.
Fabrication and characterization of micro/nanoelectronic devices; Process integration of various technologies, including CMOS, 2D materials, and nanowires; Surface processing for improved performance, including passivation, anti-reflection structures, and protective coatings. Process and device simulators illustrate concepts introduced in class. Laboratory is an integral component of this class in which students will fabricate a multi-junction semiconductor device. In-process measurement results are compared with final electrical test results and simulated designs. Students must do additional project work on a topic selected by the instructor. Students may not receive credit for both NE 407 and NE 507.
NE 508 Microsensors and Actuators 3R-3L-4C S
Graduate Studies Eligible: No
Prerequisites: NE 410 or Junior or Senior standing and consent of instructor
Corequisites: There are no corequisites for this course.
Microelectromechanical (MEMS) systems composed of microsensors, microactuators, and electronics integrated onto a common substrate. Design, fabrication, and operation principles. Examples of microsensors covered in the course include: thermal, radiation, mechanical, chemical, and biological. Laboratory is a team design project in which the students fabricate sensing devices such as pressure or thermal sensors and then characterize their behavior. Cross-listed with NE 408.
Graduate Studies Eligible: No
Prerequisites: NE 410 or Junior or Senior standing and consent of instructor
Corequisites: There are no corequisites for this course.
Microelectromechanical (MEMS) systems composed of microsensors, microactuators, and electronics integrated onto a common substrate. Design, fabrication, and operation principles. Examples of microsensors covered in the course include: thermal, radiation, mechanical, chemical, and biological. Laboratory is a team design project in which the students fabricate sensing devices such as pressure or thermal sensors and then characterize their behavior. Cross-listed with NE 408.
NE 510 Introduction to MEMS: Fabrication & Applications 3R-3L-4C S
Graduate Studies Eligible: No
Prerequisites: Junior or Senior standing
Corequisites: There are no corequisites for this course.
Properties of silicon wafers, wafer-level processes, vacuum systems, thin-film deposition via PVD, dry and wet etching, photolithography, surface and bulk micromachining, process integration, MEMS applications: heat actuators, capacitive accelerometer, DLP, bio-sensor, and pressure sensor. Students must do additional project work on a topic selected by the instructor. Cross-listed with BE 516, CHE 505, ECE 516, and ME 516.
Graduate Studies Eligible: No
Prerequisites: Junior or Senior standing
Corequisites: There are no corequisites for this course.
Properties of silicon wafers, wafer-level processes, vacuum systems, thin-film deposition via PVD, dry and wet etching, photolithography, surface and bulk micromachining, process integration, MEMS applications: heat actuators, capacitive accelerometer, DLP, bio-sensor, and pressure sensor. Students must do additional project work on a topic selected by the instructor. Cross-listed with BE 516, CHE 505, ECE 516, and ME 516.
NE 511 Advanced topics in MEMS 3R-3L-4C F
Graduate Studies Eligible: No
Prerequisites: NE 410 or NE 510 or consent of instructor
Corequisites: There are no corequisites for this course.
Topics such as: Microlithography. Design process, modeling; analytical and numerical. Use of software for layout design and device simulation. Characterization and reliability of MEMS devices. MEMS and microelectronic packaging. Introduction to microfluidic systems. Applications in engineering, biomedicine, and chemistry. Students must do additional project work on a topic selected by the instructor. Cross-listed with ME 519, ECE 519, and CHE 519.
Graduate Studies Eligible: No
Prerequisites: NE 410 or NE 510 or consent of instructor
Corequisites: There are no corequisites for this course.
Topics such as: Microlithography. Design process, modeling; analytical and numerical. Use of software for layout design and device simulation. Characterization and reliability of MEMS devices. MEMS and microelectronic packaging. Introduction to microfluidic systems. Applications in engineering, biomedicine, and chemistry. Students must do additional project work on a topic selected by the instructor. Cross-listed with ME 519, ECE 519, and CHE 519.