EP 408 - Microsensors and Actuators
- Credit Hours: 3R-3L-4C
- Term Available: S
- Graduate Studies Eligible: No
- Prerequisites: EP 410 or Junior or Senior standing, and consent of instructor
- Corequisites: None
Microelectromechanical (MEMS) systems composed of microsensors, microactuators, and electronics integrated onto a common substrate. Design, fabrication, and operation principles. Examples of microsensors covered in the course include: thermal, radiation, mechanical, chemical, and biological. Laboratory is a team design project in which the students fabricate sensing devices such as pressure or thermal sensors and then characterize their behavior. Cross-listed with EP 508.