EP 320 - FUNDAMENTALS OF THIN FILMS: FABRICATION AND APPLICATIONS
- Credit Hours: 3R-3L-4C
- Term Available: F (every other year)
- Graduate Studies Eligible: No
- Prerequisites: EP 280
- Corequisites: None
Two- and three-dimensional nanostructures, including thin film materials, single and multi-layer nano-films, electronic energy band structures, thin-film and high-k electronics, multiple quantum well devices, and optical bandgap engineering. Thin film characterization, thermal properties of thin films, growth kinetics, coating and thin film fabrication techniques: sputtering, thermal evaporation, PECVD, and atomic layer deposition.